1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.

Product Details

Published:

04/01/2020

Number of Pages:

4

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1 file , 91 KB

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2 files , 190 KB