AS ISO 14606-2006

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Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.

Product Details

Edition:
1st
Published:
10/20/2006
ISBN(s):
0733777953
Number of Pages:
15
File Size:
1 file , 690 KB
Product Code(s):
10148313, 10148302, 10148310