IEST G-CC035.1

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This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.

Product Details

Published:
07/01/2009
ISBN(s):
9780978786885
Number of Pages:
24
File Size:
1 file , 600 KB

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